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论文作者:留学生论文代写论文属性:硕士毕业论文 thesis登出时间:2011-05-31编辑:zn1987点击率:2389
论文字数:2077论文编号:org201105311127228310语种:英语 English地区:澳大利亚价格:$ 66
LTPS TFTs with Metal Electrodes Formed by Inkjet Printing Technology
Abstract
Metal electrodes for low-temperature polycrystalline-silicon(LTPS) p-channel thin-film-transistors (TFTs) have beenfabricated employing an inkjet technique. 留学生论文代写This technique has thepotential to reduce device fabrication costs and energyconsumption during the device fabrication. We have developed afine-patterning technique employing the inkjet technique that iscapable of producing metal lines with several m widths bycarefully controlling micro-liquid behavior and surfacewettability. TFTs employing the inkjet technique show goodperformance and reliability as same as conventional LTPS TFTs.These results show that the inkjet technique can be used tofabricate high-performance LTPS TFTs at low cost.
Introduction
A consumer market for active-matrix flat panel displays (AMFPD)is expanding every year. Manufacture of large area displaysis accompanied by heavy equipment, facility investment andmassive energy consumption.On the contrary, costs and energy consumption during the devicefabrication are reduced dramatically by employing an inkjettechnique instead of using conventional photolithographyprocesses since no vacuum equipment is needed and liquid-basedmaterials are deposited only where they are required.Furthermore, there are no limitations on substrate size. The inkjettechnique has already been applied to FPD manufacturing toproduce color filters for liquid crystal displays (LCDs) [1], thepixel patterns of light emitting polymers for organic light emittingdiode (OLED) displays [2], bus electrodes for plasma displaypanels (PDPs) [3] and so on. So far, however, the inkjet techniquehas not been applied to LTPS TFT backplanes for active-matrixdisplays because LTPS TFTs require much higher designaccuracy than the aforementioned FPD applications.To resolve this problem, we have developed a self-alignmenttechnique in which micro-liquid behavior and surface wettabilityare carefully controlled, and we have fabricated metal electrodesfor LTPS TFTs employing the inkjet technique. In this paper, wedescribe the inkjet technique and its use in fabricating LTPS pchannelTFTs. We also describe the characteristics and reliabilityof these TFTs.
References
[1] H. Kiguchi, S. Katagami, Y. Yamada, S. Miyashita, H.Aruga, A. Mori, T. Shimoda, R. Kimura, T. Nakamura, H.Miyamoto and Y. Takeuchi: Proceedings of Asia Display/IDW, pp. 1745-1746, 2001.
[2] S. Miyashita, Y. Imamura, H. Takeshita, M. Atobe, O.Yokoyama, Y. Matsueda, T. https://www.51lunwen.org/liuxuelunwendx/Miyazawa and M. Nishimaki:Proceedings of Asia Display/ IDW, pp.1399-1402, 2001.
[3] M. Furusawa, T. Hashimoto, M. Ishida, T. Shimoda, H.Hasei, T. Hirai, H. Kiguchi, H. Aruga, M. Oda, N. Saito, H.Iwashige, N. Abe, S. Fukuta and K. Betsui: SID Digest, pp.753-755, 2002.
[4] R. Seemann, M. Brinkmann, E. J. Kramer, F. F. Lange andR. Lipowsky: PNAS, Vol. 102, No. 6, pp.1848-1852, 2005.
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