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澳洲留学生毕业论文定制:On-line coating equipment

论文作者:留学生论文代写论文属性:硕士毕业论文 thesis登出时间:2011-06-07编辑:zn1987点击率:3816

论文字数:1715论文编号:org201106071527485983语种:英语 English地区:澳大利亚价格:$ 66

关键词:Evaporation sourceTechnology precipitationCluster

Plane Source and In-Line Deposition System for OLED Manufacturing

Abstract
Whether the manufacturing of the large-sizeOLED devices succeeds or not will stronglydepend on the concept of a thermal evaporationsource. The most important代写澳洲论文 factors in OLEDdevice manufacturing are the organic materialutilization and the TACT time. We propose an inlinetype equipment for OLED manufacturingusing a novel plane evaporation source. Theplane source maintains the organic filmuniformity at 5% and provides high materialutilization of over 60% and the proposed in-linesystem can achieve in 1 min. TACT time.

1.Introduction
The small molecule OLED (Organic LightEmitting Diode) is similar to a next-generationdisplay device because of its fast response, lowpower consumption and thinness compared toLCD devices. Nonetheless, the manufacturingequipment needs to be developed in order to leadthe time of the small molecule OLED displaydevices because standardizing the manufacturingsystem for large-sized OLED devices has yet tobe confirmed.

The evaporation source is the mostimportant technology in deposition processes ofmanufacturing. The source should guarantee thethickness uniformity of less than 5% even for thelarge size substrate and be thermally stable for thecontinuous run of over 150 hours. The pointsources provides high film uniformity, however,the material utilization is known as only 5% for370x470mm2 and it becomes much worse for730x920mm2 and 1100x1300mm2.

The OLED manufacturing system that iswidely used is known as a “cluster type”. Thistype includes the glass loading chamber, apretreatment chamber, the deposition chambersand the unloading chamber and, in the center ofthe system, there is a vacuum robot chamber forthe glass substrate to transfer into each processchamber. In fact, the two or more clusterconnectedstructure system is used in the OLED manufacturing in the industry. The cluster typesystem can be used very flexibly in the small sizeOLED manufacturing. However, in the case oflarge sized OLED manufacturing, it is difficult forthe following operations because of the substratebending. Furthermore, the vacuum robot shouldbe much enlarged.

How fast the deposition processes can bedone in a high vacuum chamber, how flat thethickness profile, and how high materialutilization for a large size substrate can beobtained are hot issues in the OLEDmanufacturing industry. Other than these, thebending of the glass substrate and https://www.51lunwen.org/australiathesis/the metal maskshould be suppressed during the depositionprocesses. Here, we propose the innovative LPSsource, plane source, belt source and the in-linedeposition system for large size OLED devicemanufacturing.

References
1 C. H. Hwang, Korea patent, 15651(2006)
2 C. H. Hwang, Korea patent, 15694(2006)
3 C. H. Hwang, Korea patent, 15701(2006)
4 C. H. Hwang, Korea patent, 15712(2006)
5C. H. Hwang, Korea patent, 20374(2006)

 

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