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Abstract
Reflectivity Inc. has developed a new micro mirror light valve technology for 代写留学生论文projection applications. A foundry-optimized manufacturing process uses existing wafer fabrication and assembly toolsets to enable low cost mass production. A high process thermal budget allows low cost packaging. The first product introduced in 2006, a 0.7 inch diagonal XGA-resolutionmicromirror device, enables system performance of over 2000lumens.

1. Evolution of Micro mirror Technology
The use of 2D arrays of deflectable elements to modulate light in projection display system dates back to the early 20thcentury.One example from the 1930s was that of Zworykin, who in a 1935patent described a system in which light from a compact source was modulated by a rectangular array of “elements or valve members” which changed position in response to electrostatic forces generated by a scanning electron beam, either in atransmissive or reflective mode [1]. In the 1960s and 70s, a teammate Westinghouse produced a working version of this concept called the Mirror Matrix Tube, which scanned an electron beam over a 1 inch diameter array of cloverleaf elements with a 40-50μm pitch[2]. With the advent of silicon-based integrated circuit technology, Petersen at IBM in 1977 demonstrated a smallness display module [3]. In 1978 Hart stein and Petersen atom described a concept for a dense array of square elements tilting in a single direction on their diagonal, with integrated MOSFET address circuitry, that was remarkably predictive of the path the technology has taken[4]. Although the IBM group did not develop this concept further, in 1983 a group at Texas Instruments, initially working on deformable membranes, switched to the deflectable-element approach. The aluminum-on-photo resist MEMS (micro-electro-mechanical-system) fabrication process they developed led to the first commercially availablemicromirror device, the TI DMD, which was introduced into the market in 1996.

2. Reflectivity Light Valve
Starting in 1998, Reflectivity Inc. began development of a newmicromirror technology approach. The first product of this efforts the RLV-D7 (Reflectivity Light Valve) micro mirror device. The specifications of this device are shown in Table 1. Thedevice is targeted at the mainstream data projection market and has very competitive performance compared to existingmicrodisplay devices. The device is a digital device with two states; pulse-width-modulation (PWM) grayscale data is loaded over a 64 bit data bus. An asymmetric switching characteristic (on angle = 16.5o, off angle = 1o in the opposite direction) allows good geometric separation of the input and exit beams at F/2.4(+/- 12o light cone) when the on-state exit light is normal to the device surface. Due to the low off angle, the absorption of incident energy in both the on and off state is low and the off-state light exit angles are moderate.

References
[1] V.K. Zworykin, “System for Reception by Television”, U.S.Patent No. 2,025,143 (24 December 1935).
[2] R.N. Thomas, J. Goldberg, H.C. Nathan son, and P.R.Malmberg, “The Mirror-Matrix Tube: A novel light valve for projection displays,” IEEE Trans. Electron Devices, Vol.ED-22, No. 9, pp. 765-775, 1975.
[3] K.E. Petersen, “Micromechanical light modulator array fabricated on silicon”. Applied Physics Letters, Vol. 31, No.8, pp. 521-23, 1977.
[4] A.M. Hart 本论文由英语论文网提供整理，提供论文代写，英语论文代写，代写论文，代写英语论文，代写留学生论文，代写英文论文，留学生论文代写相关核心关键词搜索。